中文摘要：

为提高陶瓷球研磨过程中的加工效率，本文提出了一种采用固着金刚石磨料的高效研磨技术。采用4～8μm粒径的金刚石微粉作为磨料，以光固化树脂作为结合剂，在300～500nm波长紫外线照射下，使光固化树脂快速固化，制作固着磨料研磨盘（金刚石浓度100％），以φ5mm氮化硅陶瓷球为加工对象，在自行设计的实验台上进行了加工实验。实验结果表明，在保证表面质量的前提下（Rn～40nm），材料去除率可达100μm／h，其研磨效率约为相同加工条件下传统游离磨料加工的20倍。对加工后陶瓷球表面的观察发现，氮化硅陶瓷球材料主要是以二体磨损的形式去除的。

英文摘要：

To improve the machining efficiency of ceramic balls in lapping process, a high efficiency lapping technology using fixed abrasive plate is put forward in this paper. Diamond abrasives （4 -8 μm girt size） are bonded quickly by photosensitive resin and then exposed under 300 -500 nm wavelength ultraviolet ray to fabricate fixed abrasive plate. φ5 mm silicon nitride balls are lapped with the above fabricated fixed abrasive plate. The results showed that the material removal rate under the experimental conditions was 100 μm/h, which is about 20 times higher than that in case of conventional free abrasive lapping, and the roughness R, was about 50 nm, close to that by conventional lapping. It is also identified with microscopy that groove wear is the dominant material removal mechanism in the fixed abrasive lapping process.