中文摘要：

引言 微纳尺度的汽泡动力学行为是微纳流动传热研究的基础前沿，微汽泡的成核、生长过程是典型的微流体相变现象。利用MEMS器件流路中的微小空间，控制热汽泡的生长，可实现将微汽泡生长过程所释放的膨胀功用于相变型热驱动微泵、热式喷墨打印头、微汽泡驱动的机械执行器、微汽泡驱动的生物颗粒制动器等各种微流体功能器件。

英文摘要：

The microbubble behavior on platinum microheaters immersed in parallel microchannels during flow boiling was experimentally investigated, with the heater driven by pulse-heating. With increasing heat flux of rear face heater, three representative types of microbubbles, corresponding to three instable tendencies were identified. The relations between boiling instability and bubbles behavior were analyzed. The conclusions indicated that transitions among these bubbles and various departure modes strongly depended on the instability of flow boiling in microchannels. Meanwhile, heating power of the rear face heater was also one of the main factors that affected bubbles incipience and diameters. The results of present study can provide powerful basis for the future design of new micro-fluid functional devices.