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Numerical simulation of magnetron fields under unbalanced and closed-field unbalanced magnetron and
  • 期刊名称：Frontier of Applied Plasma Technology
  • 时间：0
  • 页码：15-19
  • 语言：英文
  • 相关项目：多元透明导电氧化物薄膜光电性能的机理研究
作者： Yue Liu|Zhuo Zhao|Peter Kelly|Yanwen Zhou|
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多元透明导电氧化物薄膜光电性能的机理研究
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