中文摘要：

本实验运用MEMS技术在硅片上加工了一种新型电子冷却微泵-电液动力微泵，微泵由一组平面电极组成，施加直流来驱动流体。相关实验研究表明微泵的性能与施加电压、工作介质，电极结构和材料以及工作环境有关。

英文摘要：

A novel electronics cooling technology-electrohydrodynamic （EHD） micropump was fabricated. The EHD micropump was designed with an array of planar comb finger electrodes and driven by DC voltage, The testing result indicates that the pumping performance is proportional to the input voltage and inverse proportion to the channel height, the fluid with high permittivity and low viscosity will increase the pumping performance, and the cleanness degree of device will greatly influence EHD micropump ageing and effect.