中文摘要：

采用Modelica语言，建立光刻机超精密工件台仿真模型库，并在Mworks平台上进行联合仿真．仿真结果验证了模型的正确性，表明工件台的定位精度符合光刻机的设计要求．该仿真模型库包括直线电机模型、工件台动力学模型、PID控制器模型、逆变器模型等子模型，还可进行轨迹规划算法的比较分析，为光刻机超精密工件台的设计和改进提供了重要的分析工具和方法．

英文摘要：

A model library of ultra-precision stage for lithography was established in Modelica. The library mainly includes PMLSM, mechanical system,PID controller and inverter. The system of the stage was simulated in Mworks .The results verify the accuracy of the model library and demonstrate that the stage can realize the performance of ultra-precision absolutely. Meanwhile, the model library can make a compar- ative analysis for different profile planning methods, which provides the lithography design with important methods.