中文摘要：

为了能有效地减小微器件的体积并实现同位控制,提出了超磁致伸缩执行器同时作为执行器和传感器的自感知工作原理.分析了超磁致伸缩执行器作为双向换能器的自感知物理基础,以此建立了执行器和传感器的能量耦合模型.根据磁致伸缩材料的压磁方程,并结合励磁线圈的截面积、匝数及磁致伸缩棒的截面积、长度、弹性模量、压磁系数等,推导了感知力和感知速度的计算方法.提出了利用桥路法在强驱动信号的背景下提取感知信号的方法,在研制的执行器自感知实验系统上,验证了力感知和速度感知方法的有效性.

英文摘要：

The self-sensing principle of magnetostrictive actuator simultaneously regarded as an actuator and a collocated sensor was presented, to decrease the volume and strengthen the collocation control of micro-device. Self-sensing physical foundation of magnetostrictive actuator regarded as a bidirectional transducer was analyzed, then an energy coupling module for actuators and sensors was introduced. According to the piezomagnetic equation and combined with the section area, circle number of exciting coil as well as the section area, length, Young＇s modulus and piezomagnetic coefficient, the calculation methods of sensing force and sensing velocity were presented. The principle and implement method of picking up sensing signal in bridge circuit under the background that the signal was driven in a super power were presented. The results of the self-sensing experiment system manifested that the calculation approach of self-sensing force and velocity was effective .