提出一种用于大型光电精密仪器的自主控制静压气体轴承方案。按气体轴承刚度最大准则优化了固有节流轴承参数。给出了进气、排气、进气-排气三种主动节流方式下的承载能力特性。计算结果表明,轴承参数优化是合理的,能为自主控制轴承实现无穷刚度提供良好的负载范围。三种主动节流方式也为自主控制气体轴承提供了多样性选择。
A scheme for autonomous control of aerostatic bearing used in large-sized photoelectric precision instrument is proposed. The inherent throttle bearing parameters are optimized according to the maximum stiffness of aerostatic bearing. The carrying capabilities under three active throttle modes of air inlet, air exhaust and air inlet-exhaust are given. The calculation results show that the optimization of bearing parameters is reasonable and can provide a good load range for realizing infinite stiffness for ...