利用环形子孔径拼接干涉技术可以不需要补偿器、CGH等辅助元件就能够高分辨、低成本、高效地实现对大口径、大相对孔径非球面的检测。介绍了该技术的基本原理,并基于最小二乘法和Zernike多项式拟合建立了合理的数学模型,同时对其进行了计算机模拟实验,拼接前后全孔径相位分布残差的PV值和RMS值分别为0.0079λ和0.0027λ,说明该拼接模型和算法是准确可行的,从而提供了除零位补偿外又一种定量测试非球面尤其是大口径非球面的途径。
Annular subaperture stitching interferometry can test large-aperture, large relative aperture aspheric surfaces at high resolution, low cost and high efficiency without assistant parts. The basic principle of the stitching method was introduced, and the reasonable mathematical model and effective splicing algorithm were established based on least squares method and Zernike polynomial fitting. Meanwhile the computer simulation experiment was carried on, the PV and RMS of the full aperture phase distribution residual error are 0. 0079λ and 0. 0027λ ,respectively. The results show that this splicing model and algorithm are accurate and feasible, and it can provide another quantitive measurement for testing aspheric surfaces besides null compensation, especially for large aperture asphere.