中文摘要：

通过对压电移相器在微位移过程中端面旋转的数学建模,对其空间旋转误差进行了理论分析;基于该数学模型,利用泰曼-格林干涉系统对两种不同工艺制作的移相器进行了在线检测,根据干涉条纹的旋转及间距变化,可以定量分析高精度移相器在微位移移相过程中其端面的旋转角度以及空间任意点的位移误差,并给出了相关实验结果。表明：用该方法在线检测各种不同工艺制作的移相器,对其端面上任意点由于端面旋转引起的空间位移误差检测灵敏度达到pm量级,在0～100V驱动电压范围内进行在线移相检测,实验测量移相器的位移精度优于λ/200,对应相移精度高于0.06rad。

英文摘要：

Based on the mathematical model that describes the end-rotation of piezoelectric actuator as phase-shifter, the space-rotation error is analyzed in theory. According to the model, phase-shifters of two different processing ways are tested on Twyman-Green interference system, respectively. By processing the fringe rotation and interval changes, the phase-shifter end rotation and its space-rotation error can be analysed. With this method, the detecting sensitivity for spatial displacement induced by phase-shifter end rotation reaches picometer order; under the driving voltage from 0 V to 100 V, the micro-displacement measurement precision in the phase shifting direction is better than λ/200,corresponding to the phase shifting precision better than 0.06 rad.