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Structure and Properties of Ti-O-N Films Synthesized by Reactive Magnetic Sputtering
  • 期刊名称：Physics Procedia
  • 时间：0
  • 页码：40-45
  • 语言：英文
  • 相关项目：类碳薄膜组织结构对膜基结合力和耐磨性的影响机理研究
作者： 王志浩|冷永祥|黄楠|
同期刊论文项目
类碳薄膜组织结构对膜基结合力和耐磨性的影响机理研究
期刊论文 10 会议论文 4 获奖 2
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