中文摘要：

研究直线时栅位移测量系统中的误差规律，对提高时栅测量系统的测量精度及进一步优化系统结构具有重要意义。在分析直线时栅测量系统误差来源的基础上，定量分析了时栅误差、导轨误差、滑台及连接臂变形误差，建立了时栅测量系统的全误差模型；研制一套激光干涉仪与时栅测量系统标定实验装置，实现了时栅测量系统误差的分离，并利用该模型对测量系统进行误差修正，显著提高时栅测量系统的测量精度，修正后的精度达±8μm／m，测量不确定度减小一半。

英文摘要：

The error law in displacement measurement system of linear time grating was researched. It is important for improving the measurement accuracy and further optimizing the structure of the measurement system. On the basis of the analysis of error sources of the system, time grating errors, guideway errors, slide table errors and deformation errors of the linking ann were presented quantitatively, and the total error model of time grating was set up. An experimental device was developed to realize the error separation of the time grating measurement system by the comparison for the laser in- terferometer and time grating measurement system. The measurement accuracy of the time grating measurement system was improved significantly by correcting the system error using the error model. The precision reached to ±8μm/m after calibrating, and the measurement uncertainty was reduced by half.