中文摘要：

提出了一种新的嵌入式时栅角位移传感器的自标定方法,以提高这类传感器在没有高精度母仪标定以及参数和工作环境发生变化时的测量精度.介绍了嵌入式时栅的特点,提出了利用两个间隔一定角度离散测头之间的误差规律变换来实现自标定的方法.设计了动态自标定系统,采用卡尔曼动态滤波算法来降低动态标定过程中传感器自身稳定性波动和环境干扰的影响.为了寻求最优参数以保证标定精度,提出了残差的控制算法.最后,运用设计的自标定系统对传感器进行了标定实验,并与以往母仪标定方法进行了对比.实验结果表明,传感器的误差从标定前±20″降低到±2.4″,标定参数与实际传感器误差成分相吻合,标定精度与以往母仪标定的精度基本相同,满足时栅传感器的标定要求.

英文摘要：

A dynamic self-calibration method was proposed for an embedded time grating sensor to im- prove its measuring accuracy when it worked at changed electric parameters and measuring environ- ments and could not be calibrated by a standard instrument. The features of the embedded time grat- ing sensor were introduced, and a self-calibration method was presented by using error regular trans-formation of two discrete probes in a certain angle. Then, a dynamic self-calibration system was de- signed. To reduce the influence of sensor stability and environmental disturbance on the dynamaic cali- brating processing, a Kalman filter was used. Moreover, an algorithm for residual control was pro-posed to ensure calibration precision. Finally, the self-calibration system was applied to calibration of the embedded time grating sensor. This calibration method was compared with the traditional standard method. Experiment results show that the original errors of sensor have been reduced from ±20＂ to±2.4＂, which is nearly the same as the accuracy of standard instrument calibration and has been satis- fied the calibration requirements of time grating sensors.