中文摘要：

本文在直径为0．8mm硬质合金钻头上进行沉积金刚石涂层的研究。在沉积之前，先用硝酸和铁氰化钾进行腐蚀处理，以去除表面的Co。用微波等离子体CVD设备进行金刚石的沉积。在金刚石涂层沉积过程中，钻头尖端在微波电磁场中产生辉光放电现象，导致钻头尖端刃部很难获得金刚石涂层。通过使用金属丝屏蔽的方法改变钻头周围的微波电磁场分布，成功的采用微波等离子体CVD法在钻头上沉积出了金刚石涂层。用扫描电子显微镜（sEM），能量色散谱仪（EDS）和激光拉曼光谱（Raman）对钻头的表面形貌和金刚石薄膜的质量进行了表征，同时在铝基复合材料上进行了钻孔测试。结果表明金刚石薄膜表面比较光滑，晶粒尺寸较小，涂层质量良好，薄膜的附着力也较高。

英文摘要：

Preliminary experimental results are given on diamond coatings deposited on the cemented carbide drills with a diameter of 0.8mm in this paper. Prior to the deposition, in order to remove Co, the drills were etched by HNO3 and K3[Fe（CN）6]. A microwave plasma chemical vapor deposition （MWPCVD） device was used for the experiment. During the diamond deposition, a concentrated glow discharge was observed appearing around the tips of the drills, and diamond coatings could hardly be deposited on there. A metal wire shielding method was used to avoid the glow discharge concentration, so the diamond coated drills were prepared successfully. The surface morphology and quality of diamond coatings were examined by scanning electron microscopy （SEM）, energy disperse spectroscopy （EDS） and raman spectroscopy （Raman）. The cutting performance of the diamond-coated drill was studied by drilling SiC particle reinforced aluminum matrix composite. The results showed that the high quality diamond-coated drills have smooth roughness, small grain size and good adhesive strength.