作者机构:Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China
相关基金:Project supported by the National Natural Science Foundation of China (Grant No 90407014).Acknowledgments The authors thank Chen Feng-En of Tsinghua University for carrying out the Raman spectra measurements, and also thank Xu Jia-Dong of Institute of Semiconductors, Chinese Academy of Sciences for Mn ion implantation.