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AlCN 非晶薄膜结构及导电性研究
  • 期刊名称：真空科学与技术学报, 30(2)(2010):138-143
  • 时间：0
  • 相关项目：钛硼碳氮（TiBCN）超硬薄膜强化和高热稳定性的规律和机制
同期刊论文项目
钛硼碳氮（TiBCN）超硬薄膜强化和高热稳定性的规律和机制
期刊论文 13
同项目期刊论文
Phase configuration, nanostructure, and mechanical behaviors in Ti-B-C-N thin films
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Effect of annleaing temperature on microstructure, hardness and adhesion properties of TiSixNy super
Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetr
Microstructure and mechanical properties of reactive magnetron sputtered Ti-B-C-N nanocomposite coat
两种陶瓷薄膜的透射电镜研究
周期结构对AlTiN多层薄膜结合能影响
Ti-B-C-N纳米复合薄膜结构及力学性能研究
Effect of nitrogen content on nanostructure and mechanical properties of TiCxNy thin films
Al-C-N非晶薄膜结构及导电性研究