中文摘要：

采用逆向工程方法获取微模具的点云数据，利用逆向工程软件对点云数据进行处理、曲面重构和误差分析。获得了具有较高曲面造型精度的模具模型。利用UG加工模块，对微模具的数控微细铣削加工过程进行仿真。确定合理的切削参数和数控程序。以微小型三轴数控铣床为加工平台，利用微径球头铣刀对微模具进行加工实验。最终，实现了特征尺寸在微米级、具有复杂曲面结构微模具的高质量加工。

英文摘要：

In this paper, point cloud data of micro-mould was acquired by CMM. Commercially available reverse engineering software was used for the data processing of point cloud, surface reconstruction and error analysis. Mould model with high surface precision was achieved. Using the UG machining module, NC milling simulation of the micro-mould has been conducted and the reasonable cutting parameters, as well as NC programs were determined. Machining experiments were carried out on the 3-axis NC micro milling machine and micro milling cutter was adopted. Finally, complex surface micro-mould with feature size in micron meter and high quality was achieved in the milling experiments.