氧化物半导体气敏传感器具有灵敏度高、制造成本低、信号测量手段简单、使用方便等优点,在有毒有害气体实时监测方面极具应用潜力。综述了新型氧化物半导体气敏感器改性的研究进展、存在的问题及发展趋势。
Oxide semiconductor gas sensor possesses exceptional properties such as high sensitivity,low cost, simple method of measurement and convenience of use,which has great utilization potentiality in the aspect of the real-time detection of toxic and harmful gases.In this paper,the research progress,the existing problems, and the development trends of modified metal oxide semiconductor gas sensor was summarized.