中文摘要：

在双面抛光机中，气动加载系统要求对加载在工件上的抛光压力进行精确控制，从而保证抛光质量。为了达到这一要求，提出了气动伺服加载系统并引入特殊设计的气动数字伺服阀。同时对气动伺服加载系统进行数学建模和模块化分析，最后进行了实验研究。结果表明气动伺服加载系统能满足双面抛光的要求，可以加工出双面超平滑的硅片。

英文摘要：

In double -sided polishing machine, pneumatic loading system is required to be able to precisely control the load superimposed on the workpiece, while the polishing is being undertaken. A pneumatic servo loading system was proposed and a specially designed pneumatic digital servo valve was introduced in the system for the purpose of precise control. And the mathematical model of the system was established and the experiments were carried out by measuring the practical load on the workpiece finally. This pneumatic servo load system can satisfy the needs of double - sided polishing machine, which can successfully produce the ultra - smooth and fiat surface on both sides of silicon wafer.