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High Q, high frequency, high overtone bulk acoustic resonator with ZnO films
  • ISSN号：1869-1951
  • 期刊名称：Journal of Zhejiang University-Science C(Computers
  • 时间：2013.4.4
  • 页码：279-282
  • 相关项目：基于PZT薄膜的微压电超声换能器研究
作者： 刘梦伟|朱明博|李俊红|汪承灏|
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High Q, high frequency, high overtone bulk acoustic resonator with ZnO films