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Nano-thick resonant cantilevers with a novel specific reaction-induced frequency-increase effect for
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  • 相关项目：半导体敏感器件和半导体传感器
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半导体敏感器件和半导体传感器
期刊论文 36 会议论文 29
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服务于IC产业的MEMS探卡
服务于微电子产业的MEMS新技术