中文摘要：

将结构奇异值u综合鲁棒控制技术应用于主动抗振控制系统中，并用于解决光学移相干涉仪抗振系统的不确定性问题．采用小波分析方法将随机振动信号进行时频分析后得到低频全局信息，随后运用u综合D-K迭代法设计鲁棒u控制器对低频振动进行抑制．该方法克服了由模型自身和外部干扰所引起的不确定性，使得控制系统能够有效地抑制抗振模型的不确定性和外部振动的干扰，同时也具有很高的控制准确度和灵敏度．仿真结果表明，该方法使光学移相干涉仪在外部振动的干扰下具有较好的鲁棒稳定性和控制准确度，同时也能较好地抑制低频振动．

英文摘要：

Based on the structural singular value,the u synthesis Robust control theory is used in the control system of the active vibration isolation. It is used to solve the uncertainty of the optical phase - shifting interferometer vibration isolation system. And the wavelet theory is used to analyze the random vibration signal in the time-frequency domain and get the low frequency signal from the random vibration signal. Then the robust u controller designed by the u synthesis Robust control theory is used to restrain the low frequeney vibration. The active vibration isolation exploits the theory of Robust u Control,which overcome the uncertainty of model and the disturbance, and make the control system restrain the uncertainty of the model and the disturbance of the vibration. The simulation results indicate that this method has shown good robustness and control precision in the vibration isolation of the optical phase shifting interferometer and have good performance to restrain the low frequency vibration.