中文摘要：

将鲁棒控制技术应用于主动抗振控制系统中，并用于解决光学超精密抗振系统的不确定性问题，其中采用小波分析方法将随机振动信号进行时频分析后得到低频全局信息，随后设计鲁棒控制器对低频振动进行抑制，该方法克服了由模型自身和外部干扰所引起的不确定性，使得控制系统能够有效地抑制抗振模型的不确定性和外部振动的干扰，同时也具有很高的控制精度和灵敏度。仿真结果表明，该方法使光学测量设备在外部振动的干扰下具有较好的鲁棒稳定性和控制精度，同时也能较好的抑制低频振动。

英文摘要：

The robust control theory is used to solve the uncertainty of the optical extra-precise vibration isolation system. The wavelet theory is used to analyze the random vibration signal in the time-frequency domain and get the low frequency signal from the random vibration signal. The robust controller designed by the robust control theory is used to restrain the low frequency vibration. The active vibration isolation exploits the theory of robust control, which overcomes the uncertainty of model and the disturbance, and makes the control system to restrain the uncertainty of the model and the disturbance of the vibration. The simulation results prove that this method has shown good robustness and control precision in the vibration isolation of the optical extra-precise instrument and have good performance on restraining the low frequency vibration.