中文摘要：

利用微波等离子体化学气相沉积方法,以甲烷、氢混合气体为反应气体,具有钛镀层的玻璃作为衬底,制备了具有sp^1杂化结构的白碳纳米晶薄膜.利用X射线衍射、俄歇电子能谱,以及扫描电子显微镜对薄膜结构进行了表征.以白碳纳米晶薄膜为阴极,以镀有ITO透明导电薄膜玻璃为阳极,采用二极管结构,测试了白碳纳米晶薄膜的场致电子发射特性.开启电场为2.5 V/μm,在电场为5 V/μm时的电流密度为 200 μA/cm^2.对白碳纳米晶薄膜生长机理,以及其场致电子发射机制进行了讨论.

英文摘要：

The sp^1-hybridized nano-crystalline white carbon films were fabricated by using microwave plasma chemical vapor deposition system filling mixture gas of H2/CH4. The titanium coated glass was used to be substrate. The structure characteristics of deposited films were analyzed by X-ray diffraction, Auger electron energy spectroscopy, and scanning electron microscope. The XRD spectrum exhibits the typical signature of white carbon material. The presence of the peak at 28 =21.68° （d =0.410 7 nm）, which corresponds to the （110） diffraction line of β modifications, is taken as one evidence for the existence of white carbon film. The lattice of white carbon material has a layered structure. Each layer is formed by short carbon chains, which result from the interconnecting sp-hybridized carbon atoms. More dangling bonds will exist in the material because of its such special crystal structure, and will lead to form new valence states, which was confirmed by using Auger electron spectroscopy. The characteristics of field electron emission of the film with area of 0.8 cm^2 were measured in a base pressure of 10 ^-5 Pa by using diode structure method. The deposited nanocrystalline white carbon films were used to be cathode, and ITO coated glass to be anode. The turn-on field of 2.5 V/μm and the current density of 200 μA/cm^2 at electric field of 5 V/μm were obtained. The field electron emission from the white carbon film was so easy to be detected and had low turn-on field, probably due to the existence of the dangling bond states of the films. The growth mechanism of the white carbon films are also discussed.