中文摘要：

采用高真空直流磁控溅射的方法制备了结构为//Ta（5nm）/Co75Fe25（5nm）/Cu（2.5nm）/Co75Fe25（5nm）/Ir20Mn80（12nm）/Ta（8nm）的顶钉扎自旋阀多层膜,通过X射线衍射（XRD）、原子力显微镜（AFM）和振动样品磁强计（VSM）研究了退火对自旋阀的结构及磁性能的影响。结果表明：退火使得IrMn（111）织构减弱,表面/界面粗糙度在低温退火后增大,而较高温度退火后减小;退火后交换偏置场和被钉扎层矫顽力减小,而自由层矫顽力增加;退火后自旋阀多层膜交换偏置场随样品在反向饱和场下停留时间的增加而不发生变化。

英文摘要：

The CoFe/Cu/CoFe/IrMn spin valve multilayer was deposited by high vacuum magnetron sputtering on silicon wafer substrates,the influences of annealing on texture and magnetic properties were investigated by X-ray Diffraction（XRD）,Atomic Force Microscopy（AFM）and Vibrating Sample Magnetometry（VSM）.The results show that the texture of IrMn（111）weaken after annealing,the surface/interface roughness first increased with low temperature annealing while decreased after high temperature annealing;the exchange bias and coercivity of the pinned layer decreased after annealing,but the coercivity of the free layer increased.Moreover,the exchange field of the annealing spin valve kept nearly unchanged as the waiting time increasing.