本文利用透射电子显微术,研究了注入Fe离子的α-Al2O3,单晶(sapphire)在还原气氛退火过程中微观结构的变化。研究表明,在还原气氛退火过程中,先前注入的Fe离子析出为α—Fe纳米颗粒。一些α-Fe颗粒周围存在空洞,而一些大的α-Fe颗粒呈现出多面体的轮廓。大部分α—Fe析出相与α—Al2O3基体具有如下取向关系:(111)α-Fe//(0001)sapphire,[11^-0]α-Fe//[112^-0]sapphire。只有很少的α—Fe析出相偏离该取向关系,而最大的偏离角小于3°。近重住倒易点阵分析表明:在α-Fe和α—Al2O3体系中,该取向关系是最有利的;而在该体系中发现的另一取向关系(110)α-Fe//(0001)sapphire及〈111〉α-Fe//〈514^-0〉sapphire是次有利取向关系。
Fe ions were implanted into α-Al2O3. single crystals (sapphire) at energy, of 50 keV to a dose of 1×10^17 ions/cm^ 2 at room temperature. The mierostructure in the implanted region was studied by transmission electron microscopy. With annealing in a reducing atmosphere, the implanted Fe ions precipitate as the α-Fe particles. Some α-Fe particles are attached to voids. The large iron particles greater than 20 nm and some voids clearly have faceted outlines. Most of the α-Fe particles have the orientation relationship (OR) of ( 111 )α-Fe// (0001)sapphire. and[ 1 1^-0]α-Fe//[ 11 2^-0]sapphire with sapphire. Only a small quantity of the α-Fe particles have the deviation from this OR and the maximum deviation is less than 3°. This OR is predicted precisely by the method of coincidence of reciprocal lattice points. Another OR of (110).α-Fe//(0001)sapphire and 〈 111 〉 α-Fe// 〈 5 1^- 4^-0 〉 sapphire reported before is confirmed to be secondary preferred orientation in the α-Fe/ sapphire system.