中文摘要：

利用热蒸发Zn粉的方法，在Au／掺铝氧化锌（Az0）／石英衬底上生长ZnO纳米结构。为了研究不同温度退火后的衬底对生长的ZnO纳米结构的影响，Au／AZ0／石英衬底在生长纳米结构前分别在300、500和700℃真空下退火。Au／AZO／石英衬底的表面形貌用原子力显微镜（AFM）观测。ZnO纳米结构的微结构、形貌和光学性能分别用X射线衍射（XRD）、扫描电子显微镜（SEM）、透射电子显微镜（TEM）和荧光光谱仪进行测量。结果表明，在未退火和300℃退火衬底上生长了大量的ZnO纳米棒，而在500℃和700℃退火衬底上沉积了大量ZnO纳米颗粒。单晶结构的纳米棒的平均直径分别约50nm和80nm，其生长机制为蒸气一液体一固体（VLS）生长机制。荧光光谱显示所有的样品都存在紫外发光峰和深能级发射带，随着退火温度的升高，生长的纳米结构的紫外发光峰相对强度增强，而深能级发射强度减弱。

英文摘要：

ZnO nanostructures were successfully grown on Au/Abdoped ZnO （AZO） film/quartz sub- strates by thermal evaporation of Zn powders. In order to investigate the effect of post-annealed substrate on the growth of ZnO nanostructure,Au/AZO/quartz substrates were annealed at 300 ℃, 500 ℃ ,and 700℃ in vacuum, respectively. The surface morphologies of substrates were observed by atomic force microscopy （AFM）. The microstructure, morphologies, and optical properties of ZnO nanostructures were studied by X-ray diffraction （XRI））, scanning electron microscopy （SEM）, transmission electron microscope （TEM）, and fluorescence spectrophotometer, respectively. The results show that high-density ZnO nanorods were grown on the as-deposited and annealed substrate at 300 ℃, while nanoparticles were observed on the substrates annealed at 500℃ and 700℃. The average diameters of the nanorods with single-crystalline structure are about 50 nm and 80 nm. The grown mechanism of nanorods is va- por-liquid-solid （VLS） mechanism. Room temperature photoluminescence （PL） spectra show that the PL spectra of all samples have a UV emission peak and a broad deep-level emission peak. Moreover,as the annealing temperature increases, the intensity of UV emission enhances and the intensity of deep-lev- el emission declines.