中文摘要：

利用直流磁控溅射技术在石英基片上沉积厚度为35～112nm的钛薄膜.采用X射线衍射仪和原子力显微镜分别对薄膜的微结构和表面形貌进行观测,用分光光度计测量样品的透射和反射光谱.选用德鲁特光学介电模型,通过拟合样品的透射和反射光谱数据的方法求解钛薄膜的折射率、消光系数和厚度.结果表明,随着厚度的增加,（100）面衍射峰强度增强,薄膜的结晶性能提高;膜厚为56nm时,样品的表面为多孔结构,而大于56nm时表面为连续膜的球形颗粒结构;随膜厚的增加,表面颗粒直径逐渐增大,表面粗糙度减小.在400～2 000nm波长范围内,薄膜的透射率随膜厚的增加而减小,反射率升高;折射率在2.5与3.4之间,消光系数在0.7与1.4之间,折射率和消光系数均随膜厚的增加而增加.

英文摘要：

Titanium films with thickness ranging from 35 nm to 112 nm were deposited on quartz substrates by direct current magnetron sputtering.The microstructure,surface morphology,transmittance,and reflectance of the films were measured by X-ray diffraction,atomic force microscopy,and spectrophotometer,respectively.Based on the Drude optical dielectric model,the refractive index,extinction coefficient,and thickness of the film were calculated from transmittance and reflectance data.The results show that the crystalline performance enhances and the intensity of the（100） diffraction peak increases with the increase of thickness.When thickness is 56 nm,there are many pores on the film surface.The film is a continuous structure and there are many globular particles on surface.Surface particle size increases and surface roughness decreases with increasing thickness when thickness is larger than 56 nm.In the range of 400~2 000 nm wavelength,transmittance decreases and reflectance increases with the increase of thickness.Refractive index is between 2.5 and 3.4,and extinction coefficient is between 0.7 and 1.4.Both refractive index and extinction coefficient increase with increasing thickness.