中文摘要：

微波等离子体由于无电极污染、能在大气压下产生及电子密度大等一系列优点而具有较好的工业应用前景。因此大气压下开放式微波等离子体源的研究已经成为实现相关工业应用价值的关键。从最初的能够激发低气压空气微波等离子体的APMPS-I型微波等离子体源的研究开始,逐步通过增加某些辅助设备或改进微波反应腔的尺寸和结构,历经APMPS＋JET型、APMPS-II型最终到平行直线矩形波导微波等离子体反应腔,实现了大气压开放式微波等离子体的激发。同时,对各种微波等离子体源的原理和相关特性进行了全面阐述,在此基础上对激发出的空气微波等离子体的形态进行了分析,说明了在一定的微波功率范围内较为稳定均匀的大气压开放式空气微波等离子体的实现是具有可行性的。

英文摘要：

Microwave plasma holds some promise in practical applications due to a series of advantages such as free from contamination by electrodes,the possibility of generation at atmosphere pressure,high electron density and so on.Therefore,the study on atmosphere open microwave plasma source is key to the realization of related industrial application value.First,we research the APMPS-I type microwave plasma source that can excite air microwave plasma at low pressure,successively through APMPS＋JET type,APMPS-II type,we finally reach the design of parallel rectilinear rectangle waveguide microwave plasma reactor by the addition of auxiliary equipment called ionization jet or the improvement of the dimensions and structure of reactor cavity in our laboratory.And the excitation of atmosphere open type air microwave plasma can be realized by means of the reactors above.The distribution of electric-field strength in all kinds of cavities is simulated by a kind of simulation software named CST.Also the principle and relevant characteristics of all kinds of microwave plasma source are elaborated,and the morphology of microwave plasma is analyzed in detail.It can be perceived that the distribution of plasma and the distribution of electric-field strength are relatively consistent.Besides,the evolution of plasma is also in accordance with the electric-field distribution.In a word,the realization of relatively stable and uniform atmosphere open air microwave plasma is feasible.