中文摘要：

采用基于等离子体物理模型的时域有限差分方法模拟了金属薄膜近场成像特性;采用薄膜传输矩阵方法计算了金属薄膜对倏逝波分量的放大作用.实现了周期为1μm的Cr光栅的成像实验,验证了平板金属薄膜的模拟成像特性.

英文摘要：

The property of the near field subwavelength imaging in a metal thin-film structure is investigated using finite difference time domain method based on Drude model. Using the transfer matrix method, the transmission of this structure for the evanescent wave component is given, which illustrates the influence on the subwavelength imaging quality. In practice a Cr grating mask with 1μm period is imaged onto a photosensitive material through a silver thin film structure by utilizing the optical near-field lithography techniques.