中文摘要：

在Oliver-Pharr方法的基础上，提出一种新的纳米压痕数据分析方法称为混和方法。该方法通过量纲分析和理论分析，得到压痕过程中相关物理量之间的线性关系，在此基础上通过分析整个加卸载曲线，可实现从少量的压痕试验计算得到随压入深度连续变化的硬度和弹性模量。实验研究验证线性关系是正确的，混合方法是可靠的。

英文摘要：

Based on Oliver-Pharr method, a new method for analyzing nanoindentation data was presented, which is called hybrid method. By use of dimensional analysis and theoretical illation, several linear relationships among the variables during nanoindentation were attained, Through analyzing the whole loading-unloading curves, hardness and elastic modulus varying with indentation depth can be measured by a few nanoindentation tests. Reliability of the linear relationships and the hybrid method were verified by experimental investigation.