中文摘要：

采用高频高压等离子体电源对圆管形放电室进行放电试验，研究了放电电压、氧气体积流量和氧气体积分数等关键参数对臭氧生成的影响．结果表明：臭氧质量浓度随放电电压的升高而不断增加，但当放电电压继续升高时，温度升高引起臭氧分解加速，最终导致臭氧质量浓度下降；氧气体积流量增加，臭氧质量浓度减小，在氧气体积流量为1L／min时，臭氧质量浓度最高可以达到138g／m^3，臭氧电耗先减少后增加；氮气的存在会增大击穿电压，因此氧气质量浓度越高，越容易被电离，臭氧质量浓度越高，臭氧电耗越低．

英文摘要：

A tube type dielectric barrier discharge （DBD） chamber was used to carry out the discharge tests using a high-frequency high-voltage plasma power source, so as to study the effects of following factors on the ozone generation, such as the discharge voltage, gas flow rate and oxygen concentration, etc. Results show that the ozone concentration first increases and then decreases with rising discharge voltage, due to the accelerated decomposition of ozone with rising temperature. With the rise of gas flow rate, the ozone concentration reduces, which reaches the maximum value of 138 g/m^3 at the oxygen flow rate of 1 L/min, while the power consumption of zone generation first decreases and then increases. The presence of nitrogen helps to promote the breakdown voltage, where the oxygen is more easily ionized with the rise of its concentration, thus the ozone concentration is increased and the power consumption is lowered.