采用一种精密流量标准气体配气装置——MF-5多组份动态配气系统,在温度和压力一定时控制各组份的流量进行动态配气。研究了该系统的配气精密度。实验表明,该装置配气稳定性好、精确度高。配制值与实测值相符。
MF-5 multi-component dynamic gas confection system is an equipment that can confect gas with a precise flux control. In this paper, it is used to dynamically confect gas by controlling the flux of gas components. Its volumetric precision is studied under given temperature and pressure. The result of experiment shows that this device is stable and enjoys good precision, and the measuring values agree with the calculated ones.