中文摘要：

针对现有测量方法不能同时实现大尺寸样品表面的总体和局部形貌的三维高分辨率测量以及体积计算的不足,提出了一种形貌和体积测量方法.本文首先构建了大范围扫描离子电导显微镜（Large-scale Scanning Ion Conductance Microscopy,L-SICM）系统,并利用数据拼接技术来扩展现有SICM系统的水平测量范围,从而实现样品形貌的大范围三维高分辨率测量,最后结合背景移除等数字图像处理技术来计算目标对象的体积.对亚毫米级样品的实验结果表明,基于L-SICM的测量方法可以有效完成大尺寸样品的总体和局部形貌的三维高分辨率测量及体积计算,且避免由光学测量方法引入的非线性误差.另外,采用更小的水平扫描步距（125 nm）可以减小5.82%的体积测量误差和38.12%的测量标准差,从而提高了系统测量的准确性和稳定性.

英文摘要：

A topography and volume measurement method is proposed to deal with the drawbacks of existing methods that they cannot simultaneously finish measuring the global and local morphologies of large-scale sample surface and volume calculation in a three-dimensional （3D） and high-resolution way. The large-scale scanning ion conductance microscopy （L- SICM） system was firstly built and the data stitching technique was used to extend the lateral measurement range of the existing SICM system,thus the large-scale,3D and high-resolution measurement result of the sample morphology can be obtained. Finally ,digital image processing techniques such as subtracting background were utilized to accurately calculate the volume of the target object. Experimental results on sub-ram level sample indicate that the L-SICM based measurement method can effectively measure the global and local morphologies of large-scale sample in a 3D and high-resolution way and accomplish calculating the target volume and avoiding the nonlinear errors introduced by the optical measurement methods. Moreover, using smaller lateral scanning step （125 nm） can decrease the volumetric measurement error by 5.82% and the standard deviation of volume measurement by 38.12%, therefore improving the accuracy and stability of the measurement system.