中文摘要：

针对已有测量方法不能同时实现材料表面形貌的三维定量无损测量的不足,提出了一种基于调制电流式扫描离子电导显微镜（SICM）的表面形貌测量方法。为了提高已有SICM系统的成像质量,提出了一种调制电流扫描模式。该模式在扫描头的结构设计上采用两块压电陶瓷,并采用调制离子电流的振幅作为反馈信号。该设计不仅保证了探头对高度突变表面的成像能力,同时有助于改善系统的成像质量。对微凸透镜阵列表面的成像实验表明,相对于传统跳跃扫描模式,调制电流扫描模式可以有效降低43%的刺状噪声,从而提高成像质量。通过与扫描激光共聚焦显微镜的定量对比实验,验证了调制电流式SICM具有更准确的三维定量测量结果,且通过采用更细的探头和更小的扫描步距可以进一步提高测量结果的准确性。

英文摘要：

A surface topography measurement method using modulated-current based scanning ion conductance microscopy（SICM）was proposed to perform surface topography measurement of materials in a three-dimensional,quantitative and nondestructive way simultaneously,which is unable for existing measurement methods.In order to improve the imaging quality of the existing SICM system,a modulated-current scanning mode was presented.In this mode,two pieces of piezoelectric ceramics were utilized in the structural design of the scanning head and the amplitude of the modulated ion current was used as the feedback signal.This design not only ensures the imaging performance of the probe for badly rough and uneven surfaces,but also improves the imaging quality.The imaging experiments on the micro-lens array surface indicated that the modulated-current scanning mode can reduce 43% of the spiny noise and improve the imaging quality compared with the conventional hopping scanning mode.Moreover,the quantitative comparison of imaging results with laser scanning confocal microscopy proves that the modulatedcurrent based SICM can acquire more accurate three-dimensional quantitative measurement results,and the imaging accuracy can be further improved by using smaller probe and scanning steps.