中文摘要：

本文提出了一种高Q值RF MEMS组成的微盘谐振器和振荡器的反馈电路的低噪声。该振荡器具有较高的频率稳定性和低相位噪声。两端口谐振腔密封封装，使用廉价的富Sn Au-Sn焊料接合，从而显著提高了频率稳定性。设计了一种低噪声振荡电路，采用两级放大结构，有效地改善了频率稳定性和相位噪声性能。所测量的相位噪声为- 96 dBc / Hz的频率在1 kHz偏移and-128 dBc / Hz在远离载波偏移。此外，中期的频率稳定性和振荡偏差艾伦4-4 ppm和10 ppb，分别。振荡器是未来无线通信应用中的一个很有前途的组成部分。

英文摘要：

This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermetically encapsulated using low-cost Sn-rich Au-Sn solder bonding, which significantly improves the frequency stability. A low noise oscillator circuit was designed with a two-stage amplifying architecture which effectively improves both the frequency stability and phase noise performance. The measured phase noise is -96 dBc/Hz at 1 kHz offset and-128 dBc/Hz at far-from-carrier offsets. Moreover, the medium-term frequency stability and Allan deviation of the oscillator are 4-4 ppm and 10 ppb, respectively. The oscillator is a promising component in future wireless communication application.