中文摘要：

微运动测量是微纳制造技术研究的一项重要内容。文章将滤波器方法和多尺度方法相结合,提出了一种用于测量微运动的多尺度高精度方法。在该方法中,采用滤波器方法计算测量图像的梯度,并利用多尺度金字塔迭代方法对测量图像进行降采样和低通滤波,将较大像素的图像运动转化为多个小像素的图像运动进行估计,从而提高运动估计精度。提出的方法用于测量2个像素附近的谐振器图像运动时,测量偏差接近0.004个像素。实验模拟结果表明,这种多尺度方法能够实现高精度微运动测量。

英文摘要：

Micro-motion measurement plays a significant role in the micro/nano manufacturing technology. A multiscale approach with high accuracy for micro-motion measurement that incorporated the filter techniques into multiscale approach was proposed. In such a method, the image gradients were computed using the filter method.The measured images were downsampled and Iowpass filtered using the multJscale pyramid Jterative approach, and the larger pixels motions were converted into multiple small motions to estimate. Therefore, the estimator accuracy can be improved. For resonator images, the measurement bias of the proposed method approaches 0.004 pixels for motions near 2 pJxels. Experimental simulations show that the multiscale approach can measure micro-motions with high accuracy.