中文摘要：

采用RF磁控溅射方法制备了Ag-MgF2复合薄膜。通过XRD测量，发现当退火温度在300-500℃时，Ag以晶态形式镶嵌在非晶态介质中；当退火温度低于300℃时候，Ag以非晶态形式存在。在分层镀Ag和MgF2薄膜后，经过热处理使Ag颗粒扩散在MgF2介质中，通过AFM观察，对复合薄膜形貌进行了分析：如果先镀MgF2薄膜，再镀Ag薄膜，发现Ag颗粒主要分布在薄膜的表面，并且富集形成较大的颗粒，表现出块体Ag的吸收特性。而先镀Ag薄膜，然后再镀MgF2薄膜，经过热处理，可以形成Ag颗粒均匀镶嵌在介质中形成的复合薄膜。同时对样品的吸收特性也进行了研究。

英文摘要：

Ag/MgF2 films were prepared by radio-frequency magnetron method. Subsequent heat treatment at different temperatures from 200 to 500℃. Alternative growth of Ag and MgF2 thin layer combine to anneanng was introduced in the film＇s preparation. The XRD data indicates that,Ag crystalloidal nanoparticles exist in the films as the annealing temperature above 300℃. As the contrast,non-crystalloidal Ag was found in the films annealed below 300℃. The AFM image of sample imply that,in the Ag layer was first prepared films, nanocomposite films consist of nanosized Ag particles embedded in MgF2 matrix. The fine structure of plasmon resonance absorption peak was also found in such films. Otherwise,nanosized Ag particles mostly assembled near surface of the films if the MgF2 layer was first prepared. The annealing effects on the optical absorption of film are also investigated.