中文摘要：

提出了一种新颖的人工亚微米／纳米散斑制作技术．采用超声波分散亚微米／纳米颗粒，然后利用范德华力、静电力和毛细力将其吸附在试件表面．在特定分辨率的扫描电镜下，物体表面的亚微米／纳米颗粒可以看作是亚微米／纳米散斑．此外，发展了一种测量面内亚微米／纳米级变形的电子显微镜散斑照相技术．详细介绍了人工制作亚微米／纳米散斑和电子显微镜散斑照相技术，实验验证了技术的可行性

英文摘要：

A novel artificial sub-micron or nanometer speckle fabricating technique was proposed by taking advantage of sub-micron or nanometer particles. In the technique, sub-micron or nanometer particles were adhered to an object surface by using ultrasonic dispersing technique. The particles on the object surface can be regarded as sub-micron or nanometer speckle by using a Scanning Electronic Microscope （SEM） at a special magnification. And,an Electron Microscope Speckle Photography （EMSP） method was developed to measure in-plane submicron or nanometer deformation of the object coated with the artificial sub-micron or nanometer speckles. The principle of artificial sub-micron or nanometer speckle fabricating technique and the EMSP method were discussed in detail. The experimental results verified that the artificial sub-micron or nanometer speckle fabricating technique and EMSP method is feasible.