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OPTIMUM DESIGN OF PROCESSING CONDITION AND EXPERIMENTAL INVESTIGATION OF GRATING FABRICATION WITH HOT EMBOSSING LITHOGRAPHY
  • ISSN号：0894-9166
  • 期刊名称：《固体力学学报：英文版》
  • 时间：0
  • 分类：TS972.1[轻工技术与工程] TN305.7[电子电信—物理电子学]
  • 作者机构：[1]AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China, [2]National Center for Nanoscienee and Technology, Beijing 100084, China
  • 相关基金：Project supported by the National Basic Research Program of China （Grant No.2010CB631005）, National Natural Science Foundation of China （Grant Nos.10625209, 10732080, 90916010）, Beijing Natural Sciences Foundation （Grant No.3072007）, and Program for New Century Excellent Talents （NCET） in Universities and Chinese Ministry of Education （Grant No.NCET-05-0059）.Acknowledgements The authors deeply thank NIL Technology APS for providing stamp and National Center for Nanoscience and Technology for providing experimental equipment.
作者： Jianguo Zhu[1], Huimin Xie[1], Minjin Tang[1], Xiaojtm Li[2]
关键词： 最佳工艺条件, 优化设计, 光刻工艺, 光栅线, 实验, 有限元方法, 加工, 热压, grating fabrication, hot embossing lithography, finite element, experiment
中文摘要：

在热凸刻平版印刷术过程的聚合物变丑的剖面图侧面被有限元素方法为各种各样的温度，时间和压力学习。为了成功地制作高周波的栅栏，排队，一个最佳的印记条件被选择，相关实验被执行。制作栅栏被 SEM 图象和 AFM 分析照亮，它与模仿的结果同意很好。因此，有限元素方法对管理模式定义和为成功的栅栏制造处理条件的最佳的设计的聚合物流动现象的更好的理解有用。

英文摘要：

The cross-section profiles of polymer deformation in the hot embossing lithography process were studied by finite element method for various temperature, time and pressure. In order to successfully fabricate high-frequency grating lines, an optimal imprint condition was selected and the related experiments were carried out. The fabricated gratings were illuminated by the SEM image and AFM analysis, which agree well with the simulated results. Therefore, the finite element methods are helpful for a better comprehension of the polymer flow phenomena governing the pattern definition and the design of optimum processing conditions for successful grating fabrication.

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期刊信息
  • 《固体力学学报：英文版》
  • 主管单位:
  • 主办单位:中国力学学会
  • 主编：郑泉水
  • 地址：武汉市珞喻路1037号华中科技大学南一楼西北508室
  • 邮编：430074
  • 邮箱：amss@mail.hust.edu.cn
  • 电话：027-87543737
  • 国际标准刊号：ISSN：0894-9166
  • 国内统一刊号：ISSN：42-1121/O3
  • 邮发代号:
  • 获奖情况:
  • 国内外数据库收录:
  • 被引量:133