中文摘要：

利用准分子激光加工技术,以Al2O3陶瓷材料作为试件,构建表面微观形貌.采用表面形貌仪测量表面轮廓,用自行开发的表面形貌参数表征软件系统绘制轮廓曲线,研究准分子激光加工工艺参数与修饰表面微观形貌之间的关系.结果表明,随着激光器上放大器电压和激光脉冲频率的增大,刻蚀凹槽深度逐渐增大,而随着扫描速度的增大,刻蚀凹槽深度却逐渐减小.此外,还发现刻蚀凹槽呈锥状,且两侧出现了稍微的隆起,这是由凹槽两侧少量喷溅物造成的.

英文摘要：

The texturing was performed on the surfaces of Al2O3 ceramic by excimer laser. The profile was measured by surface topography instrument and drew by the self-developed software system of describing the surface by the topography parameters. The relationship of excimer laser processing parameters and surface topography was studied. The results indicate that the deep of eroded slot increases with the increases of amplified volt, laser pulse frequency, and decreases with the increases of laser scanning frequency. Besides, it can be found that the eroded slots are taper and apophysis. It is obvious that there are a little sputters on both of slot sides.