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中文摘要：
以硝酸铋、硝酸铁以及柠檬酸为原料通过化学液相法在普通载玻片、（100）Si片和（100）ITO玻璃上分别制备了不同厚度的BiFeO3薄膜，研究了热处理温度对BiFeO3的形成以及微观形貌的影响。Si片上的薄膜由于与衬底之间的反应，得到纯BiFeO3相热处理温度需低于650℃，而在普通载玻片和ITO玻璃衬底上，525℃到650℃均可以得到结晶良好的纯BiFeO3薄膜。550℃热处理得到的BiFeO3薄膜中的晶粒尺寸大约在70～80nm之间，650℃热处理得到的晶粒尺寸约有140nm。磁性能测试证明薄膜有弱铁磁性，饱和磁化强度约在7000-9000A／m。
英文摘要：
Using BeNO3. FeNO3 and citric acid as starting materials, BiFeO3 films with different thickness were fabricated by chemical solute method on commonly used slide glass, （100） Si sheet and （100）ITO glass. The effects of heat treatment temperature on the formation of BiFeO3 and micromorphology were studied. The heat treatment temperature should be lower than 650℃ if pure BiFeO3 are wanted, because of the reaction between the films on Si and substrate. However, the pure BiFeO3 film could be obtained from 525℃ to 650℃ on the commonly used slide glass and ITO glass. The grain sizes of BiFeO3 films are between 70-80 nm by 550℃ heat treatment, while the grain size at 650℃ is about 140nm. The magnetism test show that the films are weak ferromagnetic and its saturation magnetization is about 7000- 9000 A/m.
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