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Effects of vapor environment and counter-surface chemistry on tribochemical wear of silicon wafer
  • ISSN号：1023-8883
  • 期刊名称：Tribology Letters
  • 时间：0
  • 页码：-
  • 相关项目：单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究
作者： Lei Chen|Yonggang Meng|Linmao Qian|Seong H. Kim|
同期刊论文项目
单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究
期刊论文 30 会议论文 1 获奖 8 专利 4 著作 2
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