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Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
  • ISSN号：1931-7573
  • 期刊名称：Nanoscale Research Letters
  • 时间：2013.3.27
  • 页码：1-8
  • 相关项目：单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究
作者： Cui, Shuxun|Dong, Hanshan|Yu, Bingjun|Qian, Linmao|
同期刊论文项目
单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究
期刊论文 30 会议论文 1 获奖 8 专利 4 著作 2
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