中文摘要：

采用GC-TCD考察介质阻挡放电技术（DBD）处理SF6的效果,并采用红外吸收光谱进行产物分析.结果表明,电源电压的增加、放电时间的延长、气体介质分压的降低,以及少量其它气体（Ar,N2,O2,H2O,空气）的加入能够提高转化效果.另外,SF6的降解率随着空气湿度的增加而增加,28.2kPa相对湿度为51%的空气与2.0kPaSF6的混合气体放电后SF6降解率达92%.放电产物包括SiF4,SF4,SOF2,SOF4,SO2F2.

英文摘要：

The optimal parameters of the decomposition of SF6 were investigated by changing the reaction conditions of dielectric barriers discharge （DBD） such as the applied voltage, discharge time, initial pressure of SF6, and pressure of different additive gases（Ar, N2, O2, H2O, air）. GC-TCD was used to quantitative determination of SF6. The results indicated that decomposition of SF6 can be improved by increasing applied voltage, prolonging discharge time, reducing the pressure of medium gas or mixing trifle amount of additive gases. Further study on discharging with air in different humidity demonstrated that the addition of 28.2 kPa air with a relative humidity of 51% can make the decomposition rate of 2.0 kPa SF6 up to 92%. SiF4, SF4, SOF2, SOF4, SO2F2 were detected by FT-IR as discharge by products.