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Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films
  • ISSN号：0022-3093
  • 期刊名称：Journal of Non-Crystalline Solids
  • 时间：2014.3.15
  • 页码：86-90
  • 相关项目：氧掺杂的镶嵌在碳化硅中硅纳米晶的制备及其缺陷研究
作者： Wang, Linqing|Wang, Weiyan|Huang, Jinhua|Zeng, Yuheng|Tan, Ruiqin|Song, Weijie|Chen, Jianmin|
同期刊论文项目
氧掺杂的镶嵌在碳化硅中硅纳米晶的制备及其缺陷研究
期刊论文 10
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