中文摘要：

设计制作了一种基于氧化锌纳米线的谐振式硅加速度计，该加速度计的敏感单元为由氧化锌纳米线横跨金属微电极组成的谐振器。采用介电电泳的方法组装了氧化锌纳米线，并利用FIB沉积Pt将氧化锌纳米线固定在微结构上以确保结构的可靠性。在加速度的作用下，质量块引起的惯性力通过支撑梁对纳米线施加应力，因此，在谐振条件下，纳米线谐振频率的变化反映了加速度的大小。谐振式加速度计的准数字输出能解决多数MEMS器件输出微弱信号检测难的问题。实验结果表明，加速度计的灵敏度随着纳米线的厚度的减小而急剧增加，选择500nm厚度的纳米线作为理论分析，加速度计的灵敏度可达2．5kHz／g以卜。

英文摘要：

A design and fabrication method for a silicon micromachined resonant accelerometer based on a zinc oxide （ZnO） nanowire is reported. The key and sensitive element of the accelerometer is a nanowire-based resonator with a single ZnO nanowire suspended across two micromachined Cr/Au e lectrodes. A dielectrophoresis technique is used to assemble the ZnO nanowire onto electrodes,then a Focused Ion Beam （FIB） is employed to deposit Pt on the contact between the nanowire and electrodes to clamp the nanowire and eliminate the Sehottky barriers at the interfaces. When an external acceleration is applied, the inertial force generated by the proof mass imposes a stress on the nanowire through the beams that support the suspended proof mass. Consequently, the acceleration is associat ed with the shift in the resonant frequency of the nanowire. By its quasi-digital output, the trouble in detecting feeble analog signals from most MEMS devices could be averted. Experimental results show that the sensitivity of the accelerometer increases dramatically with the decrease of the nanowire＇s thickness, In the design, nanowire with a thickness of 500 nm is selected for the theoretical analysis, and the sensitivity of the acceleration sensor is estimated to be more than 2.5 kHz/g.