以精密工程、超精密工程为背景,总结了微致动技术的定义、特征与分类.分别阐述了传统和现代微致动的工作原理,介绍了其发展现状,并讨论了微致动应用形式.
Definition and classification of micro actuation technology were systematically stated from the view of precision engineering and ultra precision engineering. The principle and development of traditional and modem micro actuation were respectively introduced. Finally, the application means of micro actuation was discussed.