采用物理气相沉积的方法通过控制生长参数,在硅衬底上获得不同形貌的氧化锌纳米阵列。在金属场发射系统中测量了它们的场致电子发射性能,发现阴极发射电流不稳定主要是由于氧化锌纳米阵列的不均匀性造成的.采用高压励炼技术可以增强氧化锌场发射的稳定性,使电流波动明显降低.此外,形貌对氧化锌纳米阵列的场发射电流密度和阈值电压有明显影响,而且不同形貌的氧化锌纳米阵列的抗溅射能力也不相同.
Well-aligned zinc oxide nanorods with different morphologies were fabricated on silicon substrates via a simple thermal evaporation method. The field emission measurements of these ZnO arrays show that the emission instability was mainly caused by the non-uniformity of emission tips in the arrays. DC ageing process was adopted and found that it was an effective way to improve the emission stability. The morphology of ZnO arrays has also effected obviously on the field emission property, and the optimized morphology exhibits better field emission property.