中文摘要：

像素偏振片阵列在实时测量光的斯托克斯参量方面具有重要的应用.本文设计和制作了基于金属铝纳米光栅的像素偏振片阵列,制作工艺基于电子束曝光技术.偏振片阵列单元尺寸为7.4μm,每相邻2×2单元的透偏振方向分别为0,π/4,π/2和3π/4.光栅周期为140 nm,占空比为0.5,深度100 nm,光栅面型为矩形.像素偏振片阵列的扫描电子显微镜照片显示,制备的偏振片阵列的金属纳米光栅栅线无断线、无交叉、无杂物污染,光栅栅线结构平直,厚度均匀,满足理想矩形面型.采用偏振光作为照明光的光学显微镜拍摄图片显示,像素偏振片阵列整体形状规则,具有很好的偏振特性,最大偏振透射率可达到79.3%,消光比可达到454.将像素偏振片阵列与CCD （charge coupled device）集成在一起,采集单帧图像即可计算图像的斯托克斯参量,从而得到拍摄物体线偏振度图像和线偏振角图像,实现了偏振增强,可应用于目标反隐和识别.

英文摘要：

Pixelated polarizer array can be used in the real-time measurement of Stokes parameters. In this paper, pixelated polarizer array based on the aluminum nano-grating is designed and fabricated, and the fabrication technology is electron beam exposure technology. The size of each unit is 7.4 μm, and the polarization directions of each adjacent 2 × 2 units in the polarizer array are 0,π/4,π/2, and 3π/4. The period, duty cycle, depth and surface type of the grating are 140 nm, 0.5, 100 nm and rectangle type, respectively. The scanning electron micrographs of the pixelated polarizer array show that there is no disconnection, cross and pollution on the fabricated metal nano-grating lines. The nano-grating lines are straight and uniform in thickness, and the surface type of the grating is ideal rectangular type. The polarization optical micrographs show that the pixelated polarizer array has good polarization characteristics. The maximum polarization transmissivity can reach 79.3%, and the extinction ratio can arrive at 454. Furthermore, the pixelated polarizer array is integrated with the charge coupled devise chip, and the Stokes parameters can be calculated from one frame, then the degree of linear polarization and angle of linear polarization can be obtained. Thus, the polarization enhancement of image is achieved, which can be used in the anti-stealth and recognition.