中文摘要：

玻璃毛细管由于它的通光性和真空差分性能被越来越广泛应用于同步辐射光束线中．为了更好地了解毛细管阵列的性能，利用国家同步辐射实验室光谱辐射标准和计量光束线（U26）研究了不同长度和直径比的玻璃毛细管阵列对VUV和软X射线传输效率，并利用该站电离室部分研究了真空差分性能．给出了实验数据．直径实测为134tLm，长度分别为71Tim（L／D＝52．2）和19mm（L／D＝141．8）的玻璃毛细管阵列，当光束垂直于截面入射时，其理论计算传输效率都为61％，而实验测得的值分别为44％和24％左右．当低真空端气体压强设为120Pa时，通过玻璃毛细管阵列后，用TMP110机组抽气时，高真空端真空度为7．6×10^-2Pa，其真空差分能力达到1．6×10^3倍．

英文摘要：

Transmission effieiencies of glass capillary array in different ratios of length to diameter were researched in the spectral regions of VUV and soft X-ray by use of spectral radiation standards and metrology station （U26） in NSRL, and its vacuum differential performance was also researched. The experiment data were presented. When the beam incident angle is zero, single eapillary＇s inside diameter is 134 um, the calculated transmission efficiency of the glass capillary array for two different lengths, 7 mm （L/D=52.2） and 19 mm（L/D= 141.8） is the same, about 61%, while the actually measured transmission rate is about 44% and 24%, respectively. When the higher pressure side of the glass capillary array is set at 120 Pa, the pressure on the other side is 7. 6 × 10^-2 Pa when it is pumped with TMP-110 system, which shows the differential capacity is 1.6 ×10^3 times.